Disadvantages of silane method

How to prepare polysilicon by the silane method?

admin on December 17, 2021 • 0 Comments • Tags: #chemicalpreparationofpolysilicon #disadvantagesofsilanemethod #preparationmethodofpolysilicon

Silane is actually an abbreviation for monosilane. Silane is easy to thermally decompose, and high-purity polysilicon can be obtained by decomposing at 800~900℃, and the reduction energy consumption is low. In addition, monosilane is easy to purify and is a gas at room temperature, so it can be effectively removed by adsorption purification methods. The … Read More